McBain ZIII Micro Inspection System
Inspection and Measuring Microscope
The McBain ZIII Micro Inspection System is the industry standard for CD measurements and inspection, pre/post dicing inspection, pre/post probing inspection, mask inspection, image stitching and critical particle counting.
Key Features
- Up to 11 inches of vertical travel
- Manual or motorized X-Y-Z options
- 6", 8" or 12" travel X-Y stage options, transmitted or solid reflected light
- LED illumination
- Wafer loading available
- Laser or video autofocus available
- Integrated ergo station or integrated walk up station options
- Built-in PC, monitor(s) and keyboard
- Isolation vibration
- Power conditioner, EMO
- Leica optics packages with brightfield, darkfield, Nomarski and POL options
- UV, NIR and ULWD optics available
- Choice of theta axis
- Digital imaging with monochrome camera up to 12 megapixel or RGB color up to 12 megapixel
- DRO or computer options
- Joystick, trackball or push button controls for motorized axis